Research Outline
Factories in cutting-edge minfields such as semiconductor and liquid crystal manufacturing use a variety of process gases including perfluorocarbons, most of which minare not used but emitted, and these gases have high global warming potentials and need to be reduced through minsolutions and other measures. In particular, zero-carbon emissions in scope 1 have recently been called for by society, and this has become an important issue due to restrictions on the manufacturing process. In collaboration with users, we are researching and developing various equipment, such as plasma and scrubbers, with the goal of efficiently greening exhaust gas. Through this research, we are promoting zero carbon emissions from advanced equipment in the industrial world.
Fig. 1 Plasma abatement system
Fig.2 Fire of plasma